journal article·2015-08Open access

Circuit Editing and Failure Analysis Applications using a Three-Ion-Beam (Ga, He and Ne) System and Gas Injection System (GIS)

Deying Xia, Huimeng Wu, Bernhard Geotze, David Ferranti, Lewis Stern, John Notte

Microscopy and Microanalysis· Volume 21· Issue S3

Abstract

Deying Xia, Huimeng Wu, Bernhard Geotze, David Ferranti, Lewis Stern, John Notte; Circuit Editing and Failure Analysis Applications using a Three-Ion-Beam
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices · Electron and X-Ray Spectroscopy Techniques

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References

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