journal article·2011-07Open access

Development of C/SiN Hybrid Sealing-Film for Environmental-Cell Window

T Kawasaki, T Miura, Z Cui, H Tsutsui, H Matsutani, T Tanji

Microscopy and Microanalysis· Volume 17· Issue S2

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Surface Polishing Techniques · Ion-surface interactions and analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

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