journal article·2014-08Open access

Ultra Low Voltage Secondary and Backscatter Imaging in FE-SEM - Successes and Challenges

Natasha Erdman, Vern Robertson, Masateru Shibata

Microscopy and Microanalysis· Volume 20· Issue S3

Abstract

Natasha Erdman, Vern Robertson, Masateru Shibata; Ultra Low Voltage Secondary and Backscatter Imaging in FE-SEM - Successes and Challenges, Microscopy and
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OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Non-Destructive Testing Techniques · Electron and X-Ray Spectroscopy Techniques

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