journal article·2019-08Open access

Adjusting the STEM Sample Holder Potential for Improved EBIC Contrast

Matthew Mecklenburg, William A. Hubbard, Ho Leung Chan, B. C. Regan

Microscopy and Microanalysis· Volume 25· Issue S2

Abstract

Journal Article Adjusting the STEM Sample Holder Potential for Improved EBIC Contrast Get access Matthew Mecklenburg, Matthew Mecklenburg Core Center of Excellence in Nano Imaging, University of Southern California, Los Angeles, USA Corresponding author: matthew.mecklenburg@usc.edu Search for other works by this author on: Oxford Academic Google Scholar William A Hubbard, William A Hubbard Department of Physics and Astronomy, University of California, Los Angeles, USACalifornia NanoSystems Institute, University of California, Los Angeles, USA Search for other works by this author on: Oxford Academic Google Scholar Ho Leung Chan, Ho Leung Chan Department of Physics and Astronomy, University of California, Los Angeles, USACalifornia NanoSystems Institute, University of California, Los Angeles, USA Search for other works by this author on: Oxford Academic Google Scholar B C Regan B C Regan Department of Physics and Astronomy, University of California, Los Angeles, USACalifornia NanoSystems Institute, University of California, Los Angeles, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 2354–2355, https://doi.org/10.1017/S1431927619012509 Published: 01 August 2019
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Research context

OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis

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References (6)

Show source-provided references
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5. The authors would like to thank Claude Kroupa, Robert Bent, and Nathan Didier from JEOL for their help with accessing and modifying the sample holder biasing circuit. Data presented here were acquired at the Core Center of Excellence in Nano Imaging (CNI) at the University of Southern California. This work was supported by National Science Foundation (NSF) award DMR-1611036 and by NSF STC award DMR-1548924 (STROBE).
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