Latest Developments in Multiple Ion Species Plasma FIB Technology
Source abstract
Abstract
Brandon Van Leer, Mikhail Dutka; Latest Developments in Multiple Ion Species Plasma FIB Technology, Microscopy and Microanalysis, Volume 25, Issue S2, 1 Au
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Advanced Materials Characterization Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (5)
Show source-provided references
1. 10.1017/S143192761700204510.1017/S1431927617002045 ↗
2. Tesch · Proceedings from the 34th International Symposium for Testing and Failure Analysis · 2008 · 6
3. 10.1017/S143192761100410710.1017/S1431927611004107 ↗
4. 10.1557/mrs2007.6310.1557/mrs2007.63 ↗
5. 10.1557/mrs2007.6210.1557/mrs2007.62 ↗