High Spatial Resolution Spectroscopy in a FE-SEM: X-ray Microanalysis and Electron Energy-Loss Spectroscopy
Source abstract
Abstract
Hendrix Demers, Nicolas Brodusch, Raynald Gauvin; High Spatial Resolution Spectroscopy in a FE-SEM: X-ray Microanalysis and Electron Energy-Loss Spectrosco
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Advancements in Photolithography Techniques
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References (5)
Show source-provided references
1. 10.1116/1.278787410.1116/1.2787874 ↗
2. 10.1017/S143192761600387110.1017/S1431927616003871 ↗
3. 10.1017/S143192761600110010.1017/S1431927616001100 ↗
4. This work was supported by Hitachi High-Technologies Canada Inc.
5. 10.1046/j.1365-2818.2002.01062.x10.1046/j.1365-2818.2002.01062.x ↗