journal article·2017-07Open access

Reducing Electron Beam Damage with Multipass Transmission Electron Microscopy

Colin Ophus, Thomas Juffmann, Stewart A Koppell, Brannon B Klopfer, Robert Glaeser, Mark A Kasevich

Microscopy and Microanalysis· Volume 23· Issue S1

Abstract

Colin Ophus, Thomas Juffmann, Stewart A Koppell, Brannon B Klopfer, Robert Glaeser, Mark A Kasevich; Reducing Electron Beam Damage with Multipass Transmission E
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Near-Field Optical Microscopy

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References (6)

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1. Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. This research was also supported by the Gordon and Betty Moore Foundation and the Stanford Graduate Fellowship..
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