journal article·2015-08Open access

Secondary Electron Yield at High Voltages up to 300 keV

Jane Howe, David Hoyle, Kota Ueda, Stas Dogel, Hooman Hosseinkhannazer, Matthew Reynolds, Rene Veillette, Michel L. Trudeau, David Joy

Microscopy and Microanalysis· Volume 21· Issue S3

Abstract

Jane Howe, David Hoyle, Kota Ueda, Stas Dogel, Hooman Hosseinkhannazer, Matthew Reynolds, Rene Veillette, Michel L Trudeau, David Joy; Secondary Electron Y
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advancements in Photolithography Techniques

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References (6)

Show source-provided references
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