Multi-Beam Scanning Electron Microscope Design
Source abstract
Abstract
Pieter Kruit, Yan Ren; Multi-Beam Scanning Electron Microscope Design, Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 574–575, https
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (6)
Show source-provided references
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6. 10.1111/jmi.1222410.1111/jmi.12224 ↗