Quantification of Subsurface Damage in a Brittle Insulating Ceramic by Three-Dimensional Focused Ion Beam Tomography
Source abstract
Abstract
Abstract In this study, we present a fully automated method to investigate and reconstruct the three-dimensional crack structure beneath an indent in a highly insulating material. This work concentrates on issues arising from a long automatic acquisition process, the insulating nature of the specimen, and the introduction of minimal damage to the original cracks resulting from indentation.
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques
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References (19)
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