journal article·2010-07Open access

Twice Flipped - Avoiding Milling Curtains in FIB Prepared TEM Specimens of Nano-Electronics Devices

J Gazda, J Duarte, F Daby-Merrill

Microscopy and Microanalysis· Volume 16· Issue S2

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques · Advanced Materials Characterization Techniques

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References

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