Direct Patterning of Nanometer-Scale Structures on Insulating Substrates with Variable Pressure Electron Beam Lithography (VP-eBL)
Source abstract
Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Optical Coatings and Gratings · Advancements in Photolithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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