Performance of Low-kV Aberration-corrected STEM with Delta-corrector and CFEG in Ultrahigh Vacuum Environment
Source abstract
Abstract
Takeo Sasaki, Shigeyuki Morishita, Yuji Kohno, Masaki Mukai, Koji Kimoto, Kazu Suenaga; Performance of Low-kV Aberration-corrected STEM with Delta-correcto
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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References (2)
Show source-provided references
1. 10.1103/PhysRevLett.117.15300410.1103/PhysRevLett.117.153004 ↗
2. 10.1093/jmicro/dfq02710.1093/jmicro/dfq027 ↗