On-Axis Electrode Aberration Correctors for Scanning Electron/Ion Microscopes
Source abstract
Abstract
A Khursheed, W K Ang; On-Axis Electrode Aberration Correctors for Scanning Electron/Ion Microscopes, Microscopy and Microanalysis, Volume 21, Issue S4, 1 J
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Advancements in Photolithography Techniques
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References (6)
Show source-provided references
1. US patent application, U.S. Serial No. 62/041,208..
2. LORENTZ-2EM, Integrated Engineering Software Inc., Canada..
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6. 10.1116/1.235796710.1116/1.2357967 ↗