Energy Analyzer Attachments for the Scanning Electron Microscope
Source abstract
Abstract
The Scanning Electron Microscope (SEM) is a high resolution imaging instrument, indispensable to research and development in Nano Science and Nano Technology. By integrating electron energy analyzers into its specimen chamber, it has the potential to become a powerful analytical tool that can map material science information on the Nano-Scale. This paper will review some selected aspects of research work aimed at developing electron energy analyzers attachments for the SEM.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Surface and Thin Film Phenomena · Advancements in Photolithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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