Automated Sample Preparation of Low-k Dielectrics for FESEM

R R Cerchiara; P E Fischione; J J Gronsky; J M Matesa; A C Robins; D W Smith; S J Rozeveld; C Wood; E Beach; J Waeterloos

doi:10.1017/s143192760550463x

journal article·2005-08Open access

Automated Sample Preparation of Low-k Dielectrics for FESEM

R R Cerchiara, P E Fischione, J J Gronsky, J M Matesa, A C Robins, D W Smith, S J Rozeveld, C Wood, E Beach, J Waeterloos

Microscopy and Microanalysis· Volume 11· Issue S02

Publisher page Open full text

Source abstract

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Only a short abstract or summary was supplied by the source.

Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Advanced Materials Characterization Techniques

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