TEM Study of Surface Damage and Profile of a FIB-Prepared Si Sample
Source abstract
Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis · Electron and X-Ray Spectroscopy Techniques
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References
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