Applications of a Novel FIB-SIMS Instrument in SIMS Image Depth Profiling
Source abstract
Abstract
G McMahon, J Nxumalo, MW Phaneuf; Applications of a Novel FIB-SIMS Instrument in SIMS Image Depth Profiling, Microscopy and Microanalysis, Volume 8, Issue
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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