Probing and Analyzing Buried Interfaces of Multifunctional Oxides Using a Secondary Electron Energy Analyzer

Abstract A contactless method of probing and analyzing multifunctional oxide interfaces using an electron energy analyzer inside a scanning electron microscope is presented. High contrast experimental secondary electron analyzer signals are used to detect changes in the interface conductivity of a LaAlO₃/SrTiO₃ sample. Monte Carlo simulations of the primary beam/specimen interaction are carried out and correlated with the experimental results in order to help understand the role of the primary beam energy and adjust it to enhance contrast.