journal article·2002-08Open access

Estimation of the Electron Beam Energy Spread for TEM Information Limit

Michael A. O'Keefe, Peter C. Tiemeijer, Maxim V. Sidorov

Microscopy and Microanalysis· Volume 8· Issue S02

Abstract

Michael A O'Keefe, Peter C Tiemeijer, Maxim V Sidorov; Estimation of the Electron Beam Energy Spread for TEM Information Limit, Microscopy and Microanalysi
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Advancements in Photolithography Techniques

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