Data Preparation for Quantitative High-Resolution Electron Microscopy

Abstract: A method is described to prepare a high-resolution electron micrograph for quantitative comparison with a simulated high-resolution image. The experimental data are converted from the darkening of film used to acquire the image to units of electrons per incident electron, the same units used in the simulation. Also, distortions in the image arising from distortions in the image-forming lenses of the electron microscope are removed to improve the quality of the data. Finally, an alignment procedure is described which gives precise, pixel-by-pixel alignment of the experimental image with the simulated image. Examples of the procedure are shown to illustrate how actual data are prepared for quantitative analysis.