journal article·2003-08Open access

FIB Micro-Pillar Sampling Technique For 3D Stem Observation And Its Application

T. Yaguchi, M. Konno, T. Kamino, T. Hashimoto, T. Onishi, K. Umemura, K. Asayama

Microscopy and Microanalysis· Volume 9· Issue S02

Abstract

T Yaguchi, M Konno, T Kamino, T Hashimoto, T Onishi, K Umemura, K Asayama; FIB Micro-Pillar Sampling Technique For 3D Stem Observation And Its Application,
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications · Advanced Materials Characterization Techniques

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References

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