Nondestructive Angle-resolved X-ray Depth Profiling: Interpretation of Angle-resolved Profiles Using a Monte Carlo Approach

Abstract A technique has been developed for the interpretation of composition-depth profiles from angleresolved X-ray data using a Monte Carlo electron scattering simulation. This is a nondestructive depth profiling procedure. Software has been developed that uses a Monte Carlo scattering simulation to generate the signal intensity from a multilayer sample for any combination of primary beam angle of incidence and take-off angle to the X-ray detector. An interactive C++ application uses this simulation to interpret measured angle-resolved depth profiles. The method has been tested using a custom-made Ag/Al “staircase” sample containing two layers each of Ag and Al. Using the technique, it is possible to quantify the composition-depth profile for the two- and three-layer “steps” of the sample. Qualitative information may be gained about the four-layer area of the sample.