Surface Damages on FIB prepared TEM-Specimens: Possibilities of Avoidance and Removal
Source abstract
Abstract
Birgit Arnold, Dina Lohse, Hans-Dietrich Bauer, Thomas Gemming, Klaus Wetzig, Klaus Binder; Surface Damages on FIB prepared TEM-Specimens: Possibilities of
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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