Sequential Tilting 4D-STEM for Improved Momentum-Resolved STEM Field Mapping

Abstract Momentum-resolved scanning transmission electron microscopy (MRSTEM) is a powerful phase-contrast technique that can map lateral magnetic and electric fields ranging from the micrometer to the subatomic scale. Resolving fields ranging from a few nanometers to a few hundred nanometers, as well as across material interfaces, is particularly important since these fields often determine the functional properties of devices. However, it is also challenging since they are orders of magnitude smaller than atomic electric fields. Thus, subtle changes in diffraction conditions lead to significant changes in the measured MRSTEM signal. One established approach to partially overcome this problem is precession electron diffraction, in which the incident electron beam is continuously precessed while precession-averaged diffraction patterns are acquired. Here, we present an alternative approach in which we sequentially tilt the incident electron beam and record a full diffraction pattern for each tilt and spatial position. This approach requires no hardware modification of the instrument and enables the use of arbitrary beam tilt patterns that can be optimized for specific applications. Furthermore, recording diffraction patterns for every beam tilt allows access to additional information. In this work, we use this information to create virtual large-angle convergent beam electron diffraction patterns to assess MRSTEM data quality and improve field measurements by applying different data analysis methods beyond simple averaging. The presented data acquisition concept can readily be applied to other 4D-STEM applications.