journal article·2024-07-24

Advancing In-Situ Sample Preparation for MEMS-Based Electrical and Electro-Thermal (S)TEM Characterization

Vesna Srot, Rainer Straubinger, Felicitas Predel, Peter A van Aken

Microscopy and Microanalysis· Volume 30· Issue Supplement_1
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Abstract

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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Surface and Thin Film Phenomena · Non-Destructive Testing Techniques

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Affiliations

Max Planck Institute for Solid State Research , Stuttgart , Germany

Protochips Inc. , Morrisville NC , USA

References (2)

Show source-provided references
1. Srot · Microscopy and Microanalysis · 2023 · 29 · 59610.1093/micmic/ozad004 ↗
2. Protochips Webinar Series