PFIB and STEM EBIC: A Potent Combination for Operando TEM of Electronic Devices

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advancements in Semiconductor Devices and Circuit Design · Electron and X-Ray Spectroscopy Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

NanoElectronic Imaging, Inc. , Los Angeles, CA , USA

University of California Los Angeles , Los Angeles , USA

References (4)