A Framework for Overcoming Resolution and Sensitivity Limits in 7nm Node Technology Inspection via Automated Imaging and Analysis
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Industrial Vision Systems and Defect Detection · Advancements in Photolithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Electrical and Computer Engineering, University of Florida , Gainesville, FL , United States
References (6)
Show source-provided references
1. Varshney · 2020
3. Oho · 2006 · 50
4. EVHA: Explainable Vision System for Hardware Testing and Assurance—An Overview10.1145/3590772 ↗
5. Jessurun · 2022
6. Ribeiro · 2016