Investigating Implantation Damage in Silicon Carbide Using ADF STEM and Multislice Ptychography
Bibliographic record
Abstract
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Research context
OpenAlex topics: Advanced Materials Characterization Techniques · Advanced Surface Polishing Techniques · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
Department of Materials Science and Engineering, Massachusetts Institute of Technology , Cambridge, MA , United States
References (2)
Show source-provided references
1. Castelletto · Journal of Physics: Photonics · 2020 · 2 · 022001
2. He · Journal of Micromanufacturing · 2018 · 1 · 11510.1177/2516598418785507 ↗