journal article·2024-07-24Open access

Focused Ion Beam Milling of Soft Materials for Improved Sample Preparation

Tugba Isik, Guanyi Wang, Yijin Liu, Yuzi Liu, Si Chen

Microscopy and Microanalysis· Volume 30· Issue Supplement_1

Abstract

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Research context

OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis

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Affiliations

X-ray Science Division, Argonne National Laboratory , Lemont, IL , United States

Nanoscience and Technology Argonne National Laboratory , Lemont, IL , United States

Department of Chemical and Paper Engineering, Western Michigan University , Kalamazoo, MI , United States

Walker Department of Mechanical Engineering, The University of Texas at Austin , Austin, TX , United States

References (5)

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3. Burnett · Ultramicroscopy · 2016 · 161 · 11910.1016/j.ultramic.2015.11.001 ↗
4. Giannuzzi · Microscopy and Microanalysis · 2017 · 17 · 64610.1017/S1431927611004107 ↗
5. Ziegler · Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms · 2010 · 268 · 1818