Exploring 4DSTEM-in-SEM: From Implementation to Material Characterization
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Abstract
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
Department of Physics & IRIS Adlershof, Humboldt-Universität zu Berlin , Berlin , Germany
References (7)
Show source-provided references
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4. Fundenberger · Ultramicroscopy · 2016 · 161 · 1710.1016/j.ultramic.2015.11.002 ↗
5. Schweizer · Ultramicroscopy · 2020 · 213 · 11295610.1016/j.ultramic.2020.112956 ↗
6. Caplins · Ultramicroscopy · 2020 · 219 · 11313710.1016/j.ultramic.2020.113137 ↗
7. Müller · physica status solidi (a) · 2024 · 221 · 230014810.1002/pssa.202300148 ↗