STEM in SEM and Multiple Beam SEM: Past Achievements and Future Prospects
Bibliographic record
Abstract
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Albuquerque , NM , United States
References (11)
Show source-provided references
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4. Riedesel · Metrology, Inspection, and Process Control for Microlithography XXXIII SPIE · 2019 · 10959 · 669
5. Ren · Journal of Vacuum Science & Technology B · 2016 · 3410.1116/1.4963064 ↗
6. Z. Phys · 1938 · 108 · 553
7. Brodusch · Ultramicroscopy · 2019 · 203 · 2110.1016/j.ultramic.2018.12.015 ↗
8. Trimby · Ultramicroscopy · 2012 · 120 · 1610.1016/j.ultramic.2012.06.004 ↗
9. Sugar · Microscopy and Microanalysis · 2020 · 26 · 63010.1017/S1431927620001671 ↗
10. Ritchie · Microscopy and Microanalysis · 2023 · 29 · 192110.1093/micmic/ozad109 ↗
11. Caplins · Ultramicroscopy · 2020 · 219 · 11313710.1016/j.ultramic.2020.113137 ↗