Determining the Best Ar Ion Milling Sample Preparation Conditions for SEM Applications
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Abstract
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
E.A. Fischione Instruments, Inc. , Export, PA , USA
References (1)
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1. Ziegler · Nucl. Instrum. Methods Phys. Res. Sect. B Beam Interact. Mater. Atoms. · 2010 · 268 · 181810.1016/j.nimb.2010.02.091 ↗