Metrology of Sample Preparation for Electron Microscopy: Application to Strain Measurements
Source abstract
Abstract
Many techniques have been developed for strain measurements, such as X-ray diffraction [1], electron back-scattered diffraction (EBSD) All the techniques can be complex and require specific calibration routines.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advancements in Photolithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
E.A. Fischione Instruments , Inc. Export, PA U.S.A
References (8)
Show source-provided references
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4. Nguyen · Procedia Engineering · 2017 · 184 · 38110.1016/j.proeng.2017.04.108 ↗
5. Rodríguez-Martínez · 201210.1051/epjconf/20122604036 ↗
6. Klostermann · Acta Metall · 1964 · 12 · 35510.1016/0001-6160(64)90004-5 ↗
7. Nowakowski · Microscopy and Microanalysis · 2016 · 22 · 1210.1017/S143192761600091X ↗
8. Michael · Microscopy and Microanalysis · 2021 · 110.1017/S1431927621013738 ↗