Detectability & Sensitivity vs Incident Beam Energy in Modern Analytical Electron Microscopes
Source abstract
Abstract
Journal Article Detectability & Sensitivity vs Incident Beam Energy in Modern Analytical Electron Microscopes Get access Nestor J Zaluzec Nestor J Zaluzec Photon Sciences Directorate, Argonne National Laboratory, Lemont, Il, USA Corresponding author: zaluzec@microscopy.com Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 784–786, https://doi.org/10.1017/S1431927622003555 Published: 01 August 2022
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
Photon Sciences Directorate , Argonne National Laboratory, Lemont, Il, USA
References (15)
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