journal article·2022-08-01

Electron Backscatter Diffraction Analysis of Beam Sensitive Samples Using Direct Detection Technology

Matthew M Nowell, René de Kloe

Microscopy and Microanalysis· Volume 28· Issue S1
Publisher page

Abstract

Matthew M Nowell, René de Kloe; Electron Backscatter Diffraction Analysis of Beam Sensitive Samples Using Direct Detection Technology, Microscopy and Micro
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Semiconductor Detectors and Materials · Near-Field Optical Microscopy

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Affiliations

EDAX LLC. , Pleasanton, CA USA

EDAX B.V. , Tilburg, The Netherlands

References (3)

Show source-provided references
1. Wilkinson · Physical Review Letters · 2013 · 11110.1103/PhysRevLett.111.065506 ↗
2. Jariwala · Joule · 2019 · 310.1016/j.joule.2019.09.001 ↗
3. Adhyaksa · Advanced Materials · 2018 · 3010.1002/adma.201804792 ↗