Smart Automation: Machine Learning Enabled Workflow for Logic and DRAM
Source abstract
Abstract
John Flanagan, Ashley Sixtos, Chris Hakala, Justin Roller, Hayley Johanesen; Smart Automation: Machine Learning Enabled Workflow for Logic and DRAM, Micros
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Explainable Artificial Intelligence (XAI) · Machine Learning in Materials Science · Advanced Neural Network Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. Towards automatic alignment of a crystalline sample in an electron microscope along a zone axis10.1016/j.ultramic.2012.09.010 ↗
2. Long, Jonathan , Shelhamer, Evan , Darrell, Trevor . “Fully Convolutional Networks for Semantic Segmentation”, Cornell University, Computer Science, Computer Vision and Pattern Recognition, print 1411.4038 (8 March 2015); https://arxiv.org/abs/1411.403810.1109/CVPR.2015.7298965 ↗
3. Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices10.1117/12.2514995 ↗