Uncovering the Mechanism for Electron-beam Manipulation of Dopants in Silicon
Source abstract
Abstract
Alexander Markevich, Bethany Hudak, Andrew Lupini, Toma Susi; Uncovering the Mechanism for Electron-beam Manipulation of Dopants in Silicon, Microscopy and
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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References (9)
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1. 10.1038/s42254-019-0058-y10.1038/s42254-019-0058-y ↗
2. 10.1038/ncomms1304010.1038/ncomms13040 ↗
3. 10.1088/1361-6528/aabb7910.1088/1361-6528/aabb79 ↗
4. 10.1002/smll.20180177110.1002/smll.201801771 ↗
5. 10.1021/acs.nanolett.8b0240610.1021/acs.nanolett.8b02406 ↗
6. Su · Science Advances · 2019 · 5
7. 10.1103/PhysRevLett.113.11550110.1103/PhysRevLett.113.115501 ↗
8. 10.1016/j.ultramic.2017.03.00510.1016/j.ultramic.2017.03.005 ↗
9. 10.1021/acsnano.8b0200110.1021/acsnano.8b02001 ↗