An Integrated in SEM Multi-Purpose AFM Instrument Utilizing an Active Cantilever

Journal Article An Integrated in SEM Multi-Purpose AFM Instrument Utilizing an Active Cantilever Get access Mathias Holz, Mathias Holz Nano Analytik GmbH, Ilmenau, Germany Corresponding author: m.holz@nanoanalytik.net Search for other works by this author on: Oxford Academic Google Scholar Alexander Reum, Alexander Reum Technische Universität Ilmenau, Ilmenau, Germany Search for other works by this author on: Oxford Academic Google Scholar Ahmad Ahmad, Ahmad Ahmad Nano Analytik GmbH, Ilmenau, GermanyTechnische Universität Ilmenau, Ilmenau, Germany Search for other works by this author on: Oxford Academic Google Scholar Tzvetan Ivanov, Tzvetan Ivanov Nano Analytik GmbH, Ilmenau, Germany Search for other works by this author on: Oxford Academic Google Scholar Christoph Reuter, Christoph Reuter Technische Universität Ilmenau, Ilmenau, Germany Search for other works by this author on: Oxford Academic Google Scholar Martin Hofmann, Martin Hofmann Nano Analytik GmbH, Ilmenau, Germany Search for other works by this author on: Oxford Academic Google Scholar Ivo W Rangelow Ivo W Rangelow Nano Analytik GmbH, Ilmenau, Germany Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 806–807, https://doi.org/10.1017/S1431927619004768 Published: 01 August 2019