Determining the Causes of Scanning Distortions in SEM and FIB
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Abstract
Mariusz Pluska, Andrzej Czerwinski, Marek Wzorek, Marcin Juchniewicz, Jerzy Katcki; Determining the Causes of Scanning Distortions in SEM and FIB, Microsco
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Force Microscopy Techniques and Applications · Advanced Surface Polishing Techniques
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References (3)
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1. 10.1016/j.nima.2010.03.13410.1016/j.nima.2010.03.134 ↗
2. 10.1111/j.1365-2818.2006.01672.x10.1111/j.1365-2818.2006.01672.x ↗
3. 10.1016/j.nima.2012.01.06110.1016/j.nima.2012.01.061 ↗