Cryo-FIB Solution Comparison for Characterization of Indium Microbond Structures

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Surface and Thin Film Phenomena · Integrated Circuits and Semiconductor Failure Analysis

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Affiliations

Carl Zeiss Microscopy GmbH, Business Sector Electronics , Oberkochen , Germany

IMEC , Leuven , Belgium

References (2)