Magnetic Sector SIMS Systems for FIB Platforms: New Developments, Applications, and Prospects

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Research context

OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques

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Affiliations

Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST) , Belvaux , Luxembourg

References (5)