Exploring the 3D Resolution of Parallax Phase Reconstruction from 4D STEM: A Dopant Depth Case Study
Abstract
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
Monash University School of Physics and Astronomy, , Melbourne, VIC, Australia
Monash Centre for Electron Microscopy, Monash University , Melbourne, VIC, Australia
Ian Holmes Imaging Center , Bio21 Molecular Science and Biotechnology Institut , Melbourne, VIC, Australia
e, University of Melbourne , Bio21 Molecular Science and Biotechnology Institut , Melbourne, VIC, Australia
National Center for Electron Microscopy , Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
University of California Department of Materials Science and Engineering, , Berkeley, CA, USA