Fast Fabrication of Micropillars for Micromechanical Testing Using a Combined fs-Laser – FIB/SEM Approach

Journal Article Fast Fabrication of Micropillars for Micromechanical Testing Using a Combined fs-Laser – FIB/SEM Approach Get access Tim Schubert, Tim Schubert Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany Corresponding author: Tim.Schubert@hs-aalen.de Search for other works by this author on: Oxford Academic Google Scholar Fang Zhou, Fang Zhou Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wuerttemberg, Germany Search for other works by this author on: Oxford Academic Google Scholar Renato Pero, Renato Pero Alemnis AG, Thun, Switzerland Search for other works by this author on: Oxford Academic Google Scholar Nicolas Randall, Nicolas Randall Alemnis AG, Thun, Switzerland Search for other works by this author on: Oxford Academic Google Scholar Timo Bernthaler, Timo Bernthaler Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany Search for other works by this author on: Oxford Academic Google Scholar Gerhard Schneider Gerhard Schneider Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 892–895, https://doi.org/10.1017/S1431927622003932 Published: 01 August 2022