A Low-Noise, Two-Channel STEM EBIC Metrology System
Source abstract
Abstract
William A Hubbard, Matthew Mecklenburg, B C Regan; A Low-Noise, Two-Channel STEM EBIC Metrology System, Microscopy and Microanalysis, Volume 28, Issue S1,
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
NanoElectronic Imaging , Inc., Los Angeles, CA, USA
University of California Los Angeles and the California NanoSystems Institute , Los Angeles, USA
References (6)
Show source-provided references
1. Everhart · Proceedings of the IEEE · 1964 · 52 · 164210.1109/PROC.1964.3460 ↗
2. Hubbard · Physical Review Applied · 2018 · 10 · 04406610.1103/PhysRevApplied.10.044066 ↗
3. Mecklenburg · Ultramicroscopy · 2019 · 207 · 11285210.1016/j.ultramic.2019.112852 ↗
4. Hubbard · Applied Physics Letters · 2019 · 115 · 13350210.1063/1.5117055 ↗
5. Hubbard · Advanced Functional Materials · 2022 · 32 · 210231310.1002/adfm.202102313 ↗
6. Hubbard · Microscopy and Microanalysis · 2020 · 26 · 312410.1017/S1431927620023880 ↗