SEM-EDS coating thickness assessment: an insight into the accuracy of Monte Carlo simulations carried out for TiN coatings using three different freeware graphical user interface
Source abstract
Abstract
Juan PN Cruz, Carlos M Garzon, Abel AC Recco; SEM-EDS coating thickness assessment: an insight into the accuracy of Monte Carlo simulations carried out for
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Semiconductor materials and devices · Metal and Thin Film Mechanics
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References (4)
Show source-provided references
1. Measuring the Thickness of Metal Films: A Selection Guide to the Most Suitable Technique
2. Matthews · Microsc Microanal · 2018 · 24 · 8310.1017/S1431927618000193 ↗
3. MC X-Ray, the Monte Carlo program for quantitative electron microscopy of real materials10.1017/S1431927610054668 ↗
4. Spectrum simulation in DTSA-II10.1017/S1431927609990407 ↗