Electron Irradiation Cleaning of the SEM and its Samples
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Abstract
Andras Vladar, David Hoyle, Hosoya Kotaro; Electron Irradiation Cleaning of the SEM and its Samples, Microscopy and Microanalysis, Volume 27, Issue S1, 1 A
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis
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References (5)
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1. 3. Sparkle EC of Hitachi High-Technologies Canada, Inc. https://www.hitachi-hightech.com/ca/
2. 5. Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces, 2018, Gurbán, S. , https://doi.org/10.1038/s41598-018-20537-410.1038/s41598-018-20537-4 ↗
3. 2. The Scanning Electron Microscope Contamination Assessment Reference Sample (SEMCARS) is available for free through a cooperation with NIST, contact the author at andras@nist.gov
4. 1. Active monitoring and control of electron-beam-induced contamination, 2001, Vladár, A. E. , https://doi.org/10.1117/12.43672410.1117/12.436724 ↗
5. 4. Contamination Mitigation Strategy for Ultra-Low Energy Electron Microscopy and Spectroscopy, 2019, Mikmeková, E. M. https://doi.org/10.1017/S143192761900323410.1017/S1431927619003234 ↗