Plasma Cleaning with Alternate Gases
Source abstract
Abstract
Ronald Vane, Ewa Kosmowska, Michael Cable; Plasma Cleaning with Alternate Gases, Microscopy and Microanalysis, Volume 26, Issue S2, 1 August 2020, Pages 27
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Surface Modification and Superhydrophobicity · Aerosol Filtration and Electrostatic Precipitation · Plasma Applications and Diagnostics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (5)
Show source-provided references
1. [2] US Patent 10,468,236 R. Vane (2019)
2. 10.1017/S143192761600108210.1017/S1431927616001082 ↗
3. 10.1017/S143192761400738710.1017/S1431927614007387 ↗
4. 10.1017/S143192761700105210.1017/S1431927617001052 ↗
5. [1] US Patent 6,452,315 R. Vane (2002)