Interface Voids and Precipitates in GaAs Wafer Bonding

Abstract Wafer bonding allows the production of Compliant Universal substrates that are made by bonding a thin (< 10 nm) layer twisted ∼45 degrees to the underlying substrate. Subsequent growth on this twisted layer results in defect free films even when the growth material has a significant lattice mismatch with the substrate. Defects on the bonding interface are a common observation when bonding GaAs to many substrates, but the exact nature of these defects has not been clear. We have studied this bonding layer in GaAs-GaAs twist bonded structures by Scanning Transmission Electron Microscopy and Electron Energy Loss Spectroscopy and established that the defects are voids with a portion being partially filled with gallium. Two general sizes of voids are seen. The larger voids are approximately 45 nm in diameter and 22 nm in the wafer normal direction and are distributed in an approximately linear relationship.