Contamination Mitigation Strategy for Ultra-Low Energy Electron Microscopy and Spectroscopy
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OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
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References (6)
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1. The authors acknowledge funding from the Technology Agency of the Czech Republic (Centre of Electron and Photonic Optics, no: TN01000008 and TG03010046).
2. 10.1016/j.diamond.2015.12.01210.1016/j.diamond.2015.12.012 ↗
3. Suzuki · 2011 · 329
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5. 10.1016/j.apsusc.2017.02.13110.1016/j.apsusc.2017.02.131 ↗
6. 10.1116/1.131520010.1116/1.1315200 ↗